Generally, the thickness and uniformity are two major items to identify if the coating result is good or not. The dispensing volume if resist could be fine-tuned by experience and equipment performance, but still 40-70% is lost during the spin-coating. The coating thickness is related to rotating speed, and the uniformity is much close to recipe.
General coater speed at 500 ~ 3000rpm.
EBR = Edge Bead Remover。
SBD-607 has a common ratio with 70/30, and also could be customized by each requirement.
品名 | 簡介 | 特性 |
---|---|---|
SBE-607 | Edge Bead Remover. |
1.SBD-607 is EBR, edge bead remover. 2. High purity PGME and PGMEA. 3. Customized available. |